[10p-N301-1~13] 15.4 III-V-group nitride crystals

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[10p-N301-1] Evaluation of the polarity-inverted AlN interface using several oxidation process

〇Tomohiro Tamano¹, Ryota Akaike^1,2, Hiroki Yasunaga^2,3, Takao Nakamura^1,2, Zentaro Akase⁴, Shigetaka Tomiya⁴, Hideto Miyake^1,2 (1.Grad. Sch. of Eng. Mie Univ, 2.IC-SDF MIe Univ., 3.ORIP Mie Univ., 4.NAIST)

Keywords:

Aluminum Nitride,Inversion domain boundaries,Sputtering