The 86th JSAP Autumn Meeting 2025
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Sun. Sep 7, 2025
Mon. Sep 8, 2025
Tue. Sep 9, 2025
Wed. Sep 10, 2025
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3:45 PM - 4:00 PM JST
(6:45 AM - 7:00 AM UTC)
[10p-N302-9]
Atomistic Simulation of Increase in Resistance of Oxidized CuAl
2
Films
〇Takahisa Tanaka
1
(1.Keio Univ.)
Keywords:
interconnect,oxidation,resistivity
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