[10p-N322-1~13] 15.6 Group IV Compound Semiconductors (SiC)

3:15 PM - 3:30 PM JST(6:15 AM - 6:30 AM UTC)

[10p-N322-7] Effects of Ammonia Treatment on formation of SiC Coating on Fe Substrates by Thermal CVD Using Vinylsilane

〇(M2)Naoto Ohshima¹, Yuki Tsuchizu², Satoru Kaneko³, Kenichi Uehara⁴, Shigeo Yasuhara⁴, Noriyuki Taoka¹, Keishiro Goshima¹, Wakana Takeuchi¹ (1.Aichi Inst. Tech., 2.Tohoku Univ., 3.KISTEC, 4.JAC)

Keywords:

Silicon Carbide,Vinylsilane,Thermal CVD