[10p-N322-1~13] 15.6 Group IV Compound Semiconductors (SiC)

3:30 PM - 3:45 PM JST(6:30 AM - 6:45 AM UTC)

[10p-N322-8] Effects of Al Incorporation on the Electrical Properties of Amorphous AlSiC Thin Films Grown by Vinylsilane and Trimethylaluminum

〇(D)Yuuki Tsuchiizu¹, Uehara Kenichi², Ohori Daisuke¹, Yasuhara Shigeo², Endo Kazuhiko¹, Takeuchi Wakana³ (1.Inst. of Fluid Science Tohoku Univ., 2.Japan Advanced Chemicals Ltd., 3.Aichi Inst. of Tech.)

Keywords:

SiC,vinylsilane,semiconductor