[10p-N324-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)

[10p-N324-1] Anisotropic Cyclic Etching of Platinum Films using Oxygen Plasma and Formic Acid Vapor Treatment

〇Kazuhiro Miwa¹, T. T. Nga Nguyen¹, Daijiro Akagi², Masaru Hori¹, Kenji Ishikawa¹ (1.Nagoya Univ., 2.AGC Inc.)

Keywords:

Anisotropic Cyclic Etching,Noble Metal,platinum