Presentation Information
[10p-N324-6]Evaluation of W etching by energetic iodine ion
〇Takuma Yanagisawa1, Hojun Kang1, Song-Yun Kang2, Dongkyu Lee2, Yuna Lee2, Kazuhiro Karahashi1, Satoshi Hamaguchi1 (1.Osaka Univ., 2.Samsung Electronics)
Keywords:
etching,Tungsten,Iodine ion