[10p-N401-1~7] 13.3 Insulator technology

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)

[10p-N401-5] Two-step deposition and characterization of ultrathin GeO2/Ge interfaces

〇Hiroki Inoue¹, Suzuki Takumi¹, Yoshitaka Iwasaki¹, Tomo Ueno¹, Mitaro Namiki¹ (1.Tokyo univ. of Agri & Tech)

Keywords:

semiconductor