[10p-N401-1~7] 13.3 Insulator technology

3:00 PM - 3:15 PM JST(6:00 AM - 6:15 AM UTC)

[10p-N401-7] Research on Ge-MOS structure using high dielectric constant materials TiO₂

〇Yota Uchida¹, Yositaka Iwazaki¹, Tomo Ueno¹ (1.Tokyo univ. of Agri & Tech)

Keywords:

semiconductor