Presentation Information

[10p-N402-10]A theoretical explanation of misorientation-direction-dependent backward diffusion of Zn in (100) InP during metalorganic vapor-phase epitaxy

〇Kazuhiro Mochizuki1, Hiroshi Ohta1, Tomoyoshi Mishima1, Fumimasa Horikiri1, Tomoaki Nishimura1 (1.Hosei Univ.)

Keywords:

diffusion,InP,Zn