[10p-N402-1~11] 15.3 III-V-group epitaxial crystals, Fundamentals of epitaxy

4:00 PM - 4:15 PM JST(7:00 AM - 7:15 AM UTC)

[10p-N402-10] A theoretical explanation of misorientation-direction-dependent backward diffusion of Zn in (100) InP during metalorganic vapor-phase epitaxy

〇Kazuhiro Mochizuki¹, Hiroshi Ohta¹, Tomoyoshi Mishima¹, Fumimasa Horikiri¹, Tomoaki Nishimura¹ (1.Hosei Univ.)

Keywords:

diffusion,InP,Zn