[10p-N403-1~11] 7.3 Micro/Nano patterning and fabrication

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[10p-N403-3] Development of Out of Band Reflectometer for EUV Lithography

〇Takumi Nukisato¹, Naoki Hayase¹, Shinji Yamakawa¹, Tetsuo Harada¹ (1.Univ. of Hyogo)

Keywords:

Out Of Band,EUV lithography