Presentation Information

[7a-N201-5]Epitaxial lateral overgrowth of c-plane α-Ga2O3 using a stripe mask with ultra-narrow windows

〇Yuichi Oshima1, Takashi Shinohe2 (1.NIMS, 2.FLOSFIA)

Keywords:

Gallium oxide,Epitaixal lateral overgrowth,dislocation