Presentation Information
[7a-N201-7]Bandgap measurement of Si-doped α-(AlGa)2O3 films with various Al composition
〇Yuta Okuyama1, Hironori Okumura1 (1.Univ. of Tsukuba)
Keywords:
wide bandgap semiconductor,XPS,Alminium Galium Oxide
wide bandgap semiconductor,XPS,Alminium Galium Oxide