[7a-N301-1~11] 15.4 III-V-group nitride crystals

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)

[7a-N301-10] In-situ ohmic contacts on Si-doped AlGaN with high Al content via pulsed sputtering

〇(DC)Aiko Naito¹, Kohei Ueno¹, Hiroshi Fujioka¹ (1.IIS, UTokyo)

Keywords:

ohmic contact,AlGaN,in-situ