[7a-N301-1~11] 15.4 III-V-group nitride crystals

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[7a-N301-2] Microstructural Characterization of RF-MBE Low-Temperature-Grown AlN Films Using Transmission Electron Microscopy

〇Shigeharu Kawabata¹, Ren Tanaka¹, Trang Nakamoto², Takashi Fujii³, Tsutomu Araki¹ (1.Ritsumeikan Univ., 2.R-GIRO, 3.ROST)

Keywords:

RF-MBE,crystal growth,transmission electron microscope