[7a-N301-1~11] 15.4 III-V-group nitride crystals

9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[7a-N301-3] Improved Crystallinity of Semipolar (11-22) AlN by Sputtering and Annealing Method

〇Daiki Kobayashi¹, Ryota Akaike^1,2, Kensei Oya¹, Hiroki Yasunaga^2,3, Takao Nakamura^1,2, Hideto Miyake^1,2 (1.Grad. Sch. of Eng., Mie Univ., 2.IC-SDF, Mie Univ., 3.ORIP, Mie Univ.)

Keywords:

AlN,semipolar (11-22),sputtering and annealing