[7a-N301-1~11] 15.4 III-V-group nitride crystals

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[7a-N301-4] High-Temperature AlN Growth on Sputtered AlN by Metalorganic Vapor Phase Epitaxy

〇(M2)Yuto Matsubara¹, Koki Fujii¹, Yusuke Takayanagi¹, Yukiya Hayashi¹, Soki Shimizu¹, Yuusuke Takashima^1,2, Yoshiki Naoi^1,2, Atsushi Maeoka³, Atsushi Osawa³, Shigeru Takatsuji³, Takahiro Kimura³, Kentaro Nagamatsu^1,2 (1.Faculty of Science and Engineering, Tokushima Univ., 2.pLED, Tokushima Univ, 3.SCREEN Holdings Co. Ltd.)

Keywords:

AlN,MOVPE