Presentation Information
[7a-N301-5]Crystallographic Orientation Control of Nonpolar AlN via Thermal Treatment
of r-Plane Sapphire Substrates
〇Shinnosuke Mori1, Ryota Akaike1,2, Hiroki Yasunaga2,3, Takao Nakamura1,2, Hideto Miyake1,2 (1.Grad. Sch. of Eng., Mie Univ., 2.IC-SDF, Mie Univ., 3.ORIP, Mie Univ.)
Keywords:
AlN,nonpolar