[7a-N301-1~11] 15.4 III-V-group nitride crystals

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[7a-N301-7] Estimation of Screw Dislocation Density in AlN from X-ray Rocking Curve

〇Rennosuke Hara¹, Ryouta Akaike^1,2, Hiroki Yasunaga^2,3, Takao Nakamura^1,2, Hideto Miyake^1,2 (1.Grad. Sch. of Eng., Mie Univ., 2.IC-SDF, Mie Univ., 3.ORIP, Mie Univ.)

Keywords:

Aluminum Nitride (AlN),Screw Dislocation Density