[7a-N301-1~11] 15.4 III-V-group nitride crystals

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[7a-N301-9] Fabrication of AlGaN Multiple Quantum Wells on Semipolar (11-22) AlN by Sputtering and Annealing Method

〇Kensei Oya¹, Ryota Akaike^1,2, Hiroki Yasunaga^2,3, Takao Nakamura^1,2, Hideto Miyake^1,2 (1.Grad. Sch. of Eng., Mie Univ., 2.IC-SDF, Mie Univ., 3.ORIP, Mie Univ.)

Keywords:

AlGaN,Multiple Quantum Wells,semipolar plane