Presentation Information

[7a-N322-5]Effect of annealing on MOS interface properties and donor density of SiO2/β-Ga2O3 stacks

〇Takumi Morita1, Takuma Kobayashi1, Kensei Maeda1, Masahiro Hara1, Heiji Watanabe1 (1.UOsaka)

Keywords:

Ga2O3,MOS,Donor Density