[7a-N405-1~6] 16.1 Fundamental properties, evaluation, process and devices in disordered materials

9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[7a-N405-1] Step-height measurement using interferometric microscope on phase-change patterns

〇Kentaro Sugawara¹, Tamihiro Gotoh² (1.NMIJ/AIST, 2.Gunma Univ.)

Keywords:

phase change

We have been conducting research to quantitatively evaluate the effect of the difference in phase state (crystalline phase and amorphous phase) on step measurement using a “optical” phase-shifting interferometric microscope (PSI). In this study, we created a line-shaped laser crystallization pattern in a Ge-Sb-Te chalcogenide phase-change film, evaluated the depth change using the PSI and an AFM, and reported that the apparent step (phase-shifting of light reflection) was about 3 nm.