Presentation Information
[7a-P01-2]CO2 laser pulse duration dependence of EUV spectra
〇Shintaro Hayasaka1, Hyato Yazawa1, Tatsuya Soramoto1, Nozomi Ogura1, Ryoma Sato1, Shinichi Namba2, Takeshi Higashiguchi1 (1.Utsunomiya Univ., 2.Hiroshima Univ.)
Keywords:
EUV,laser produced plasma,CO2 laser