The 86th JSAP Autumn Meeting 2025
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Poster presentation7 Beam Technology and Nanofabrication : 7 Beam Technology and Nanofabrication (Poster)

[7a-P01-1~9]7 Beam Technology and Nanofabrication (Poster)

Sun. Sep 7, 2025 9:30 AM - 11:30 AM JST
Sun. Sep 7, 2025 12:30 AM - 2:30 AM UTC
P01 (Gymnasium)

[7a-P01-1]Characteristics of EUV and ion emission by a liquid lithium sheet target

〇Shunya Yamamoto1, Shintaro Hayasaka1, Hayato Yazawa1, Tsukasa Sugiura1, Tatsuya Soramoto1, Yoshiyuki Honda2, Fumio Iwamoto2, Shinji Nagai2, Noriyosu Hayashizaki3, Masahiro Namekawa4, Hiroyuki Sakuyama4, Takeshi Higashiguchi1 (1.Utsunomiya Univ., 2.Gigaphoton Inc., 3.Institute of Science Tokyo, 4.Sukegawa Electric Co., LTD.)

[7a-P01-2]CO2 laser pulse duration dependence of EUV spectra

〇Shintaro Hayasaka1, Hyato Yazawa1, Tatsuya Soramoto1, Nozomi Ogura1, Ryoma Sato1, Shinichi Namba2, Takeshi Higashiguchi1 (1.Utsunomiya Univ., 2.Hiroshima Univ.)

[7a-P01-3]Multi-Beam X-ray Imaging at NanoTerasu BL09W

〇Wataru Yashiro1,2,3,4,5, Ryosuke Ueda1, Chika Kamezawa2, Hiroki Sumiishi4, Hitoshi Soyama4, Wolfgang Voegeli6, Tetsuroh Shirasawa7, Hiroyuki Kudo8 (1.SRIS, Tohoku Univ., 2.IMRAM, Tohoku Univ., 3.Grad. Eng., Univ. Tokyo, 4.Grad. Eng., Tohoku Univ., 5.Grad. Dentistry, Tohoku Univ., 6.Edu., Tokyo Gakugei Univ., 7.NMIJ, AIST, 8.Info. & Sys., Univ. Tsukuba)

[7a-P01-4]Fast fluorescence mode XAFS measurement using two-dimensional X-ray detector for dilute samples

〇Tomoya Uruga1,2, Takuma Kaneko1, Tomonao Inoue3, Takuto Sakumura3, Hideto Imai1,4, Yoshiharu Uchimoto1 (1.Kyoto Univ., 2.JASRI, 3.RIGAKU, 4.FC-Cubic)

[7a-P01-5]Development of high-energy hard X-ray photoelectron spectroscopy excited by photon energy up to 40 keV

〇Satoshi Yasuno1, Tappei Nishihara1, Okkyun Seo1, Yasumasa Takagi1 (1.JASRI)

[7a-P01-6]Development of Automated Chemical Etching Machine for EUV Multilayer Mirrors

〇(M1)Ryohei Shibata1, Riku Ogata1, Yumie Nakagome1, Mitsunori Toyoda1 (1.Tokyo Polytechnic Univ.)

[7a-P01-7]EELS Measurements of Resist Materials on a Substrate Utilizing HAXPES

〇Satoru Suzuki1, Hirosuke Sumida2 (1.Univ. of Hyogo, 2.Mazda Motor Corp.)

[7a-P01-8]Simulation study of electron beam behavior in ionospheric plasmas

〇Taiyo Kobayashi1, Tanaka Ryuki1, Yasuda Masaaki1 (1.Osaka Met. Univ)

[7a-P01-9]Ground-based simulation of neutral atmosphere for VLEO satellite

Kumiko Yokota1, Kazuki Ueta1, Yuta Takenaka1, 〇Masahito Tagawa1 (1.Kobe Univ.)
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