Presentation Information
[7a-P05-40]Simulation of remote epitaxial film removal using DeepMD
〇Shuto Araki1, Mitsuru Morimoto1, Takuji Maekawa1, Yoshinori Miyamae1, Ken Nakahara1, Shigenobu Ogata2 (1.Rohm Co., Ltd., 2.Osaka Univ.)
Keywords:
Remote epitaxy,DeepMD