Presentation Information

[7a-P05-40]Simulation of remote epitaxial film removal using DeepMD

〇Shuto Araki1, Mitsuru Morimoto1, Takuji Maekawa1, Yoshinori Miyamae1, Ken Nakahara1, Shigenobu Ogata2 (1.Rohm Co., Ltd., 2.Osaka Univ.)

Keywords:

Remote epitaxy,DeepMD