Presentation Information
[7a-P05-61]Introduction of Se defects on the surface by UV-O3 exposure and vacuum annealing to realize ALD on WSe2
〇Riku Enomoto1, Kensho Matsuda1, Ke Mengnan2, Peter Kruger1, Nobuyuki Aoki1 (1.Chiba Univ., 2.Yokohama National Univ.)
Keywords:
Transition Metal Dichalcogenides,2D Materials,high-k insulator