[7a-S103-1~7] Atomic Layer Process (ALP) analysis and application technologies (2)

10:00 AM - 10:05 AM JST(1:00 AM - 1:05 AM UTC)

[7a-S103-1] Opening

〇Yukihiro Shimogaki¹ (1.The Univ. Tokyo)

Keywords:

Atomic Layer Deposition,Atomic Layer Etching,Atomic Layer Process

This presentation will introduce the purpose of the symposium "Atomic Layer Process (ALP) analysis and application technologies" and the status of ALP-related conferences and workshops both in Japan and overseas.