[7a-S103-1~7] Atomic Layer Process (ALP) analysis and application technologies (2)

10:35 AM - 11:05 AM JST(1:35 AM - 2:05 AM UTC)

[7a-S103-3] Development of Semiconductor Deposition Processes Using Machine Learning and Mathematical Models

〇Hirokazu Kyokane¹ (1.Tokyo Electron Technology Solutions Ltd.)

Keywords:

Semiconductor production equipment,ALD,CVD