[7p-N301-1~17] CS.7 Code-sharing session of 6.1&13.3&13.5

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)

[7p-N301-7] Enhancement of Polarization Properties of Al:HfO₂ Thin Films through Multi-Shot Flash Lamp Annealing

〇Yusuke Tani¹, Yuma Ueno¹, Hideaki Tanimura¹, Tomoya Mifune², Hironori Fujisawa², Seiji Nakashima², Ai I Osaka², Shinichi Kato¹, Takumi Mikawa¹ (1.SCREEN Semiconductor Solutions, 2.University of Hyogo)

Keywords:

Ferroelectric,Flash Lamp Anneal