Presentation Information
[7p-N301-8]Electric field dependence of cycle endurance in
HfO2-based ferroelectric capacitors
〇Yuki Itoya1, Takuya Saraya1, Toshiro Hiramoto1, Masaharu Kobayashi1,2 (1.IIS, 2.d.lab)
Keywords:
Ferroelectric material,Ferroelectric capacitor,Dielectric breakdown
To clarify the breakdown mechanism of HfO2-based ferroelectric capacitors, we evaluated the electric field dependence of cycle endurance by analyzing the electrode size, ferroelectric layer thickness, and operating temperature dependence.
The electric field dependence of cycle endurance exhibited three distinct dependencies in the low, medium and high electric field regions. In high electric fields, leakage current due to electric field stress accelerates dielectric breakdown. The results of the size and temperature analyses showed that the endurance and the switching electric field had little effect on the electric field dependence. However, differences in thickness shifted the boundary between the low and medium electric field regions. These results suggest the difference between the low-field and medium-field regions is due to the suppression of dielectric breakdown progression caused by the inhibition of polarization reversal near the leakage path due to pinning.
The electric field dependence of cycle endurance exhibited three distinct dependencies in the low, medium and high electric field regions. In high electric fields, leakage current due to electric field stress accelerates dielectric breakdown. The results of the size and temperature analyses showed that the endurance and the switching electric field had little effect on the electric field dependence. However, differences in thickness shifted the boundary between the low and medium electric field regions. These results suggest the difference between the low-field and medium-field regions is due to the suppression of dielectric breakdown progression caused by the inhibition of polarization reversal near the leakage path due to pinning.