Presentation Information

[7p-N301-9]Simulation-based Verification of the Physical Mechanism Model for Wake-up Effect in Ultrathin Ferroelectric Hf0.5Zr0.5O2

〇Kosuke Ito1, Mitsuru Takenaka1, Shinichi Takagi1,2, Kasidit Toprasertpong1 (1.Univ. Tokyo, 2.ACRO)

Keywords:

HfO2-based ferroelectrics,wake-up

In this study, we validated the proposed wake-up physical model incorporating oxygen migration for 4 nm-thick Hf0.5Zr0.5O2 (HZO) through simulations. The simulation results showed good agreement with the experimental data, supporting the validity of the proposed model. This model is expected to contribute to wake-up control and reliability evaluation in future device design.