[7p-P01-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[7p-P01-6] Fabrication of nanostructured Sn-based thin films by medium pressure sputtering and their application to the anode of Li-ion batteries

〇Yoshiyuki Hasegawa¹, Tatsuo Ueda¹, Keigo Terada¹, Daiki Fujikake¹, Ryuta Murase¹, Ryosuke Yamazaki¹, Koki Sakaguchi¹, Giichiro Uchida¹ (1.Meijo Univ.)

Keywords:

sputtering,lithium-ion battery