Presentation Information

[7p-P01-7]Ionic conductivity evaluation of LiLaZrO thin films deposited in an ion sputtering process

〇Ryuta Murase1, Tatsuo Ueda1, Keigo Terada1, Yoshiyuki Hasegawa1, Daiki Fujikake1, Ryosuke Yamazaki1, Koki Sakaguchi1, Giichiro Uchida1 (1.Meijo Univ.)

Keywords:

LiLaZrO,sputtering