[7p-P01-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[7p-P01-8] Deposition of Ge-Si Thin Films by Dual-Source Sputtering and Application for Lithium-ion Batteries

〇Daiki Fujikake¹, Tatsuo Ueda¹, Keigo Terada¹, Yoshiyuki Hasegawa¹, Ryuta Murase¹, Ryosuke Yamazaki¹, Koki Sakaguchi¹, Giichiro Uchida¹ (1.Meijo Univ.)

Keywords:

sputtering,lithium ion battery