Presentation Information
[7p-P01-9]Si-based separation membrane fabrication by atmospheric pressure plasma CVD
〇(M1)Ikki Kojima1, Norihiro Moriyama1, Masakoto Kanezashi1, Hiroki Nagasawa1 (1.Hiroshima Univ.)
Keywords:
Atmospheric Pressure Plasma,Amorphous Silica Membrane,Gas Separation
Membrane separation is an energy-efficient separation technology. Porous silica membranes are molecular sieve membranes with sub-nanometer micropores and have excellent heat resistance and chemical stability. However, conventional silica membrane production methods require high temperatures and long processing times. We have been investigating the application of atmospheric pressure plasma CVD as a new membrane forming method for silica membranes. In this presentation, we discuss the formation of silica membranes using triethylsilane and the effect of the reaction gas composition on the membrane formation.