[7p-P02-1~5] 8.3 Plasma nanotechnology

[7p-P02-5] Characterization of ternary Si nanowire thin films and their application to the anode of Li-ion batteries

〇Ryosuke Yamazaki¹, Tatsuo Ueda¹, Terada Keigo¹, Yoshiyuki Hasegawa¹, Daiki Fujikake¹, Ryuta Murase¹, Koki Sakaguchi¹, Giichiro Utida¹ (1.Meijo Univ.)

Keywords:

sputtering,Li battery