Presentation Information
[8a-N105-3]In2O3 growth using In2O and H2O source gases: thermodynamic analysis and experimental evaluation of growth behavior
〇Rie Togashi1, Masato Ishikawa2 (1.Sophia Univ., 2.Gas-Phase Growth Ltd.)
Keywords:
Epitaxial Growth,Thermodynamic Analysis,Indium Oxide
In this study, we propose a novel growth process in which In2O gas is selectively generated in the source zone through the reaction of high-purity metallic indium with H2O gas, and In2O3 is subsequently grown in the growth zone via the reaction between the generated In2O gas and additional H2O gas. A thermodynamic analysis of the In2O3 growth process was conducted, followed by the construction of a custom growth system based on the analysis results. Growth experiments were carried out to evaluate and confirm the growth behavior.