[8a-N105-1~10] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)

[8a-N105-6] Improvement of CO₂ sensitivity of TFT gas sensors based on increasing the polar In₂O₃(100) ratio

〇(M1)Yuichiro Ebisawa¹, JinHyeok Cha², Tomohiro Yamaguchi¹, Shinya Aikawa¹ (1.Kogakuin Univ., 2.Chonnam Univ.)

Keywords:

thin film transistor,CO2 sensor,polycrystalline