[8a-N201-1~10] 6.1 Ferroelectric thin films

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[8a-N201-1] Epitaxial growth of Sc_xAl_1-xN with high Sc concentration

〇Takao Shimizu¹, Naoki Ohashi^1,2 (1.NIMS, 2.Science Tokyo)

Keywords:

Ferroelectric film