Presentation Information
[8a-N201-2]Control of direction of polarization in AlScN thin film by AlSc seed layer
〇(DC)Kazushi Onimura1, Yan Wu1,2, Hiroyuki Kobayashi2, Kuniyuki Kakushima1,2 (1.Science Tokyo, 2.Sumitomo Chemical Collaborative Research Cluster of Science Tokyo)
Keywords:
Ferroelectric,AlScN,Wurtzite
AlScN (Alminium scandium nitride) is attracting attention for next generation of ferroelctric material with its large polarization. Recently, application for electro-optic devices is considered and control of polarization is researched. In this study, with introducing thin AlSc seed layer in AlScN deposition, control of polarization without switching by voltage is achieved.