Presentation Information

[8a-N301-10]Demonstration of high carrier injection efficiency (>50%) AlGaN-based UV-B laser diodes

〇(M2)Takumu Saito1, Rintaro Miyake1, Shundai Maruyama1, Yusuke Sasaki1, Shogo Karino1, Seiya Kato1, Naoki Kitta1, Ryota Watanabe1, Yuma Miyamoto1, Shion Kamiya1, Sho Iwayama1, Hideto Miyake2, Satoshi Kamiyama1, Tetsuya Takeuchi1, Motoaki Iwaya1 (1.Meijo Univ., 2.Mie Univ.)

Keywords:

nitride,UV LD,metal organic vapor phase epitaxy

In AlGaN-based UV-B laser diodes, we controlled the thickness of the Al composition grading layer at the EBL/p-guide interface by low-temperature MOVPE growth at 750 ℃. As a result, the carrier injection efficiency was significantly improved from 18% to over 50%, and a maximum optical output power of 521 mW was achieved. This is the first demonstration of high injection efficiency operation in UV LDs employing polarization doping, representing an important advancement toward high-efficiency and high-power UV LDs.