Presentation Information

[8a-N301-3]Study on Graded AlGaN Layer in AlGaN-based Far-UVC LEDs

〇Ryota Akaike1,2, Hiroki Yasunaga2,3, Takao Nakamura1,2, Shuhei Ichikawa4,5, Kazunobu Kojima4, Masahiko Tsuchiya6, Hideto Miyake1,2 (1.Grad. Sch. of Eng., Mie Univ., 2.IC-SDF, Mie Univ., 3.ORIP, Mie Univ., 4.Grad. Sch. of Eng., Osaka Univ., 5.UHVEM, Osaka Univ., 6.Stanley Electric Co.)

Keywords:

AlGaN,far-UVC,graded AlGaN layer