Presentation Information

[8a-N301-7]AlGaN UV-B refractive index waveguide laser diodes: dependence of Optical characteristics and etching effects

〇(M2)Rintaro Miyake1, Takumu Saito1, Shundai Maruyama1, Shogo Karino1, Yusuke Sasaki1, Shion Kamiya1, Ryota Watanabe1, Yuma Miyamoto1, Naoki Kitta1, Seiya Kato1, Syo Iwayama1, Motoaki Iwaya1, Tetsuya Takeuchi1, Satoshi Kamiyama1, Hideto Miyake2 (1.Meijo Univ., 2.Mie Univ.)

Keywords:

semiconductor laser

In this study, a UV-B LD was fabricated on a relaxed AlGaN template, and performance improvement through the introduction of a ridge waveguide structure was investigated. Focusing on the thickness X from the active layer, the relationship between etching depth and internal loss (αi) was evaluated, suggesting that etching at heterointerfaces with large Al composition differences is a factor in device degradation.