[8a-N302-1~11] 17.3 Layered materials

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[8a-N302-2] Temperature-tunable operando- and multi-energy XPES analysis of monolayer MoS₂/c-sapphire structure

〇Takahiro Nagata¹, Yoshiki Sakuma¹, Masaaki Kobata², Tatsuo Fukuda², Tomonori Nishimura³, Shuhong Li³, Juiteng Chang³, Keisuke Atsumi³, Kaito Kanahashi³, Kosuke Nagashio³ (1.NIMS, 2.JAEA, 3.The Univ. of Tokyo)

Keywords:

hard x-ray photoelectron spectroscopy,surface and interface,MoS2

We investigated the effects of adsorbed components and process residues on the electronic properties of monolayer MoS₂ grown on a sapphire substrate by MOCVD. Using temperature-variable in situ observation and multi-energy photoelectron spectroscopy, we evaluated the chemical bonding and electronic states of the MoS₂/sapphire substrate structures. As a result, we found the decomposition and detachment of components other than MoS₂ and changes in the Fermi position as the temperature increased.