Presentation Information

[8a-N324-5]Fabrication of TSVs using Minimal Fab system and evaluation of I/V

〇Takuro Kono1, Ryuhei Sekifuji2, Fumito Imura2, Hiroyuki Tanaka3, Noriko Miura3, Shiro Hara3, Toru Aonishi4, Ichiro Akai5, Yasuo Terasawa1, Takeshi Hashishin5 (1.NIDEK Co., LTD., 2.Hundred Semiconductors Inc., 3.AIST, 4.Tokyo Univ., 5.Kumamoto Univ.)

Keywords:

Minimal Fab,TSV