[8a-N401-1~12] 15.5 Group IV crystals and alloys

11:45 AM - 12:00 PM JST(2:45 AM - 3:00 AM UTC)

[8a-N401-10] Solid phase crystallization of P-doped Si films on high-resistivity Si(001) substrates

〇Yuki Kimura¹, Shigehisa Shibayama¹, Mitsuo Sakashita¹, Yasuyoshi Kurokawa^1,2, Noritaka Usami^1,2,3, Osamu Nakatsuka^1,3, Masashi Kurosawa¹ (1.Grad. Sch. of Eng., Nagoya Univ., 2.InFuS, Nagoya Univ., 3.IMaSS, Nagoya Univ.)

Keywords:

semiconductor,Silicon