Presentation Information
[8a-N401-11]Development of large-area SiGe/Si substrates using screen printing
〇Ryo Nakao1, Shota Suzuki1, Moeko matsubara1, Hideaki Minamiyama1, Marwan Dhamrin2 (1.Toyo Aluminium K.K., 2.Osaka Univ.)
Keywords:
semiconductor,Silicon Germanium,screen printing