Presentation Information

[8a-N401-4]Rapid formation of GeH layers on Ge/Si(111) at room temperature

〇Kaito Nakajima1, Atsuki Nakayama1, Wei-Chen Wen2, Yuji Yamamoto2, Shigehisa Shibayama1, Mitsuo Sakashita1, Osamu Nakatsuka1,3, Masaaki Araidai1,3, Masashi Kurosawa1 (1.Nagoya Univ., 2.IHP - Leibniz Institute for High Performance Microelectronics, 3.IMaSS)

Keywords:

semiconductor,2D material