[8a-N403-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[8a-N403-2] Fabrication of SiO2/Si Structures by Solution Oxidation Using Sulfuric Acid

〇Shouhei Onizuka, Hoshiki Harata, Yoshitaka Iwazaki, Tomo Ueno

Keywords:

Solution oxidation method