Presentation Information

[8p-N322-5]Contactless-photoelectrochemical (CL-PEC) Etching of AlGaN/GaN Heterostructures and its self-stopping phenomenon

〇Naoki Shiozawa1, Tokachi Katsumata1, Haruki Okano1, Taketomo Sato1 (1.RCIQE, Hokkaido Univ.)

Keywords:

AlGaN