[8p-N324-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)

[8p-N324-1] Proposal on tabletop monolithic 3D-IC fab

〇WENCHANG YEH¹ (1.Shimane Univ.)

Keywords:

Silicon,MOSFET,Laser anneal